Title :
Two-Photon Polymerization System With Diffractive Superresolution Element
Author :
Wei, Peng ; Li, Ning ; Feng, Lishuang
Author_Institution :
Opto-eletronics Dept., Beijing Univ. of Aeronaut. & Astronaut., Beijing, China
Abstract :
Two-photon polymerization system has been used to fabricate the 3-D nano- and microscale devices for several years. However, there are still some important issues to be resolved. One of them is the combination of the two-photon polymerization theory and the optical diffraction theory. Based on the two-photon polymerization theory, the laser´s point spread function is analyzed so that their distribution models can be efficiently processed in micromachining. Diffractive superresolution element is introduced in the laser beam to rearrange the point spread function of the focus. Finally, the combination of the diffractive superresolution element and two-photon polymerization experiments are performed.
Keywords :
laser beam machining; light diffraction; micromachining; nanofabrication; optical transfer function; polymerisation; two-photon processes; 3D microscale device; 3D nanoscale device; diffractive superresolution element; laser point spread function; micromachining; optical diffraction theory; two-photon polymerization system; Lasers; Optical diffraction; Optical polymers; Optics; Photonics; Spatial resolution; Diffraction; micromachining; resolution; two-photon polymerization;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2010.2054077
