Title :
Microfabricated fluxgate sensors with low noise and wide bandwidth
Author_Institution :
Dept. of Eng., Cambridge Univ., UK
fDate :
2/17/2000 12:00:00 AM
Abstract :
Miniature fluxgate magnetic sensors have been micro-fabricated using thin film planar technology on glass substrates. The 1000×200 μm sensors comprise a copper multilayer solenoid winding with a thin amorphous cobalt alloy core deposited by RF magnetron sputtering. The bandwidth and sensitivity of a closed-loop sensor system using these novel devices is 0-2.5 MHz and 5000 V/T, respectively, with a spectral noise density of 2 nT/√Hz at 10 kHz
Keywords :
cobalt alloys; copper; fluxgate magnetometers; magnetic noise; magnetic sensors; sputtered coatings; thin film devices; 0 to 2.5 MHz; 1000 micron; 200 micron; Cu; Cu multilayer solenoid winding; RF magnetron sputtering; closed-loop sensor system; glass substrates; low noise; microfabricated fluxgate sensors; miniature fluxgate magnetic sensors; thin amorphous Co alloy core; thin film planar technology; wide bandwidth;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20000308
