Title :
Thick-film magnetostrictive material for MEMS
Author :
Grabham, N.J. ; White, N.M. ; Beeby, S.P.
Author_Institution :
Dept. of Electron. & Comput. Sci., Southampton Univ., UK
fDate :
2/17/2000 12:00:00 AM
Abstract :
Initial studies on a novel thick-film magnetostrictive material are presented. The screen printable thick-film is based on the giant magnetostrictive material Terfenol-D. The development of the paste and of a suitable measurement system is described. Initial values for the magnetostriction of the thick-film are reported and compared with those of other composite magnetostrictive materials
Keywords :
magnetostriction; magnetostrictive devices; micromechanical devices; printing; thick film devices; thick films; MEMS; Terfenol-D; giant magnetostrictive material; magnetostriction; measurement system; paste development; screen printable thick-film; thick-film magnetostrictive material;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20000264
