Fabrication of Planar Power Inductor for Embedded Passives in LSI Package for Hundreds Megahertz Switching DC–DC Buck Converter

Author

Ito, H. ; Takeuchi, A. ; Okazaki, Shun ; Kobayashi, Hideo ; Sugawa, Y. ; Takeshima, A. ; Sonehara, Makoto ; Matsushita, Nobuhiro ; Sato, Takao

Author_Institution

Spin Device Technol. Center, Shinshu Univ., Nagano, Japan

Volume

47

Issue

10

fYear

2011

Firstpage

3204

Lastpage

3207

Abstract

Recently, research and development of integrated low-voltage dc-dc converter to LSIs has been active. In order to realize such integrated dc power supply, power magnetic devices must be integrated in it. The authors have fabricated planar power inductor embedded in LSI package for hundreds megahertz switching dc-dc buck converter. In this study, two types of planar power inductors have been fabricated: one was spin-sprayed Zn-ferrite thick film magnetic core inductor, and the other was composite magnetic core (Fe-based amorphous/polyimide) inductor. Footprint of the fabricated inductors was 850×850 μm², their inductance was about 10 nH, and the quality factor Q was about 20 at 100 MHz. The rating current which depends on the superimposed dc characteristic was at least up to 2 A.

Keywords

DC-DC power convertors; Q-factor; integrated circuit packaging; iron; large scale integration; low-power electronics; magnetic cores; magnetic devices; power inductors; switching convertors; thick film inductors; zinc; LSI package; composite magnetic core inductor; embedded passives; frequency 100 MHz; hundred megahertz switching DC-DC buck converter; integrated DC power supply; integrated low-voltage DC-DC converter; iron-based amorphous-polyimide inductor; planar power inductor fabrication; power magnetic devices; quality factor; spin-sprayed zinc ferrite thick film magnetic core inductor; Amorphous magnetic materials; Inductance; Inductors; Large scale integration; Magnetic cores; Polyimides; Saturation magnetization; Fe-based amorphous/polyimide composite core; LSI package; Planar power inductor; Zn-ferrite thick film core; dc–dc converter; embedded passives;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2011.2147288

Filename

6027844