Combined optical/electrical simulation of CCD cell structures by means of the finite-difference time-domain method

Author

Körner, T.O. ; Gull, Ronald

Author_Institution

ISE Integrated Syst. Eng. AG, Zurich, Switzerland

Volume

47

Issue

5

fYear

2000

fDate

5/1/2000 12:00:00 AM

Firstpage

931

Lastpage

938

Abstract

A complete optoelectronic simulation of a CCD cell structure is presented. We combined the finite-difference time-domain method for simulation of the light propagation with electric device simulation methods based on drift/diffusion charge carrier transport models. In this way, the operation of the CCD can be modeled in a rigorous manner without simplifications of the geometry or use of approximate methods. As pixel sizes are continuously reduced, such rigorous models are of crucial importance for the analysis and optimization of the device performance

Keywords

Maxwell equations; charge-coupled devices; finite difference time-domain analysis; light propagation; semiconductor device models; CCD cell structures; combined optical/electrical simulation; drift/diffusion charge carrier transport models; electric device simulation methods; finite-difference time-domain method; light propagation; pixel sizes; rigorous models; Charge coupled devices; Computational modeling; Electromagnetic modeling; Electromagnetic propagation; Finite difference methods; Geometrical optics; Optical propagation; Optical sensors; Optical waveguides; Time domain analysis;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/16.841223

Filename

841223