Title :
Highly uniform vertical-cavity surface-emitting lasers integrated with microlens arrays
Author :
Eitel, S. ; Fancey, S.J. ; Gauggel, H.-P. ; Gulden, K.H. ; Bächtold, W. ; Taghizadeh, M.R.
Author_Institution :
Centre Suisse d´´Electron. et de Microtech., Zurich, Switzerland
fDate :
5/1/2000 12:00:00 AM
Abstract :
In this paper, work is described on the fabrication of highly uniform 8/spl times/8 arrays of GaAs-AlGaAs vertical-cavity surface-emitting lasers (VCSEL´s). Oxide-confined VCSEL arrays show an average threshold current of 0.74/spl plusmn/0.02 mA, an average output power of 2.05/spl plusmn/0.03 mW at 8 mA and an average power conversion efficiency of 14.3%. Their wavelength is measured to be 967/spl plusmn/0.35 nm over the array. In addition, we describe the alignment and integration of these device arrays with arrays of refractive microlenses to allow beam shaping typically required in system applications.
Keywords :
III-V semiconductors; aluminium compounds; gallium arsenide; integrated optics; microlenses; optical interconnections; quantum well lasers; semiconductor laser arrays; surface emitting lasers; 0.74 mA; 14.3 percent; 2.05 mW; 967 nm; GaAs-AlGaAs; GaAs-AlGaAs VCSELs; average output power; average power conversion efficiency; average threshold current; beam shaping; device array alignment; electrical parameter uniformity; highly uniform vertical-cavity surface-emitting lasers; microlens arrays; optical parameter uniformity; optoelectronic interconnects; oxide-confined VCSEL arrays; refractive microlens arrays; Lenses; Microoptics; Optical arrays; Optical device fabrication; Power conversion; Power generation; Surface emitting lasers; Threshold current; Vertical cavity surface emitting lasers; Wavelength measurement;
Journal_Title :
Photonics Technology Letters, IEEE
