Title :
ESD Design Strategies for High-Speed Digital and RF Circuits in Deeply Scaled Silicon Technologies
Author :
Cao, Shuqing Victor ; Chun, Jung-Hoon ; Beebe, Stephen G. ; Dutton, Robert W.
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA
Abstract :
Challenges of electrostatic discharge (ESD) protection in deeply scaled silicon technologies are addressed by improving design, characterization, and modeling of I/O MOSFETs, interconnect, ESD protection and power clamp devices. Recent progress on ESD protection design for both high-speed digital I/O and radiofrequency (RF) circuits are presented. Topological trade-offs are compared. High speed circuit protection techniques such as the T-coil based ESD design are reviewed in detail. Package- and wafer-level charged device model (CDM) correlation issues are discussed. I/O, ESD devices, and metal interconnect effects are examined using very fast transmission line pulses (VF-TLP) and TLP.
Keywords :
MOSFET; electrostatic discharge; elemental semiconductors; integrated circuit design; integrated circuit interconnections; radiofrequency integrated circuits; semiconductor technology; silicon; transmission lines; ESD design; ESD protection; I/O MOSFET; Si; deeply scaled silicon technology; electrostatic discharge protection; high speed circuit protection; high-speed digital I/O circuits; metal interconnect effects; package-level charged device; power clamp devices; radiofrequency circuits; transmission line pulse; wafer-level charged device; Clamps; Electrostatic discharge; Integrated circuit interconnections; Integrated circuit modeling; Logic gates; Transistors; Charged device model (CDM); RF; T-coil; co-design methodology; electrostatic discharge (ESD); field effect diode; high-speed I/O; integrated circuit reliability; semiconductor diodes; very fast transmission line pulses (VF-TLP);
Journal_Title :
Circuits and Systems I: Regular Papers, IEEE Transactions on
DOI :
10.1109/TCSI.2010.2071590