Title :
Temperature-insensitive micromachined AlGaAs-GaAs vertical cavity filter
Author :
Amano, T. ; Koyama, F. ; Nishiyama, N. ; Iga, K.
Author_Institution :
Precision & Intelligence Lab., Tokyo Inst. of Technol., Yokohama, Japan
fDate :
5/1/2000 12:00:00 AM
Abstract :
We have demonstrated a temperature-insensitive micromachined vertical cavity filter with an AlGaAs-GaAs distributed Bragg reflector (DBR), which can be thermally tuned by differential thermal expansion. The achieved temperature dependence was as small as +0.01 nm/K, which is one-tenth of that of conventional semiconductor based optical filters.
Keywords :
III-V semiconductors; aluminium compounds; gallium arsenide; micro-optics; micromachining; optical filters; AlGaAs-GaAs; AlGaAs-GaAs vertical cavity filter; add-drop optical filter; differential thermal expansion; micromachining; semiconductor distributed Bragg reflector; temperature dependence; temperature insensitivity; thermal tuning; Distributed Bragg reflectors; Gallium arsenide; Laser tuning; Optical filters; Plasma temperature; Temperature dependence; Thermal expansion; Tunable circuits and devices; Vertical cavity surface emitting lasers; WDM networks;
Journal_Title :
Photonics Technology Letters, IEEE
