DocumentCode
1331393
Title
Temperature-insensitive micromachined AlGaAs-GaAs vertical cavity filter
Author
Amano, T. ; Koyama, F. ; Nishiyama, N. ; Iga, K.
Author_Institution
Precision & Intelligence Lab., Tokyo Inst. of Technol., Yokohama, Japan
Volume
12
Issue
5
fYear
2000
fDate
5/1/2000 12:00:00 AM
Firstpage
510
Lastpage
512
Abstract
We have demonstrated a temperature-insensitive micromachined vertical cavity filter with an AlGaAs-GaAs distributed Bragg reflector (DBR), which can be thermally tuned by differential thermal expansion. The achieved temperature dependence was as small as +0.01 nm/K, which is one-tenth of that of conventional semiconductor based optical filters.
Keywords
III-V semiconductors; aluminium compounds; gallium arsenide; micro-optics; micromachining; optical filters; AlGaAs-GaAs; AlGaAs-GaAs vertical cavity filter; add-drop optical filter; differential thermal expansion; micromachining; semiconductor distributed Bragg reflector; temperature dependence; temperature insensitivity; thermal tuning; Distributed Bragg reflectors; Gallium arsenide; Laser tuning; Optical filters; Plasma temperature; Temperature dependence; Thermal expansion; Tunable circuits and devices; Vertical cavity surface emitting lasers; WDM networks;
fLanguage
English
Journal_Title
Photonics Technology Letters, IEEE
Publisher
ieee
ISSN
1041-1135
Type
jour
DOI
10.1109/68.841269
Filename
841269
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