DocumentCode :
1331684
Title :
Enhancement of bcc-FeCo(100) Crystalline Orientation by Introducing Oxygen
Author :
Miyamoto, Naoyuki ; Kubota, Yuko ; Mamiya, K. ; Nakagawa, Sachiko
Author_Institution :
Dept. of Phys. Electron., Tokyo Inst. of Technol., Tokyo, Japan
Volume :
47
Issue :
10
fYear :
2011
Firstpage :
3917
Lastpage :
3920
Abstract :
The introduction of oxygen at the surface of a-TbFeCo layer is effective to attain (100) orientation of bcc-FeCo layers deposited on it. The oxygen introducing time required to exhibit FeCo(100) orientation decreased as increasing oxygen flow rate. The product of oxygen flow rate and the introducing time to attain (100) orientation of FeCo was almost constant regardless of the flow rate. This may indicate that the total amount of oxygen needed to attain (100) orientation of FeCo was almost constant. Depth profiles of constituents and chemical-bonding states were observed in order to clarify the mechanism of (100) crystalline orientation of FeCo deposited on the a -TbFeCo layer with oxidized surface. It was found that oxygen atoms existed at the interface between TbFeCo and FeCo layers in the specimen that exhibited (100) orientation of FeCo. It was also confirmed that the Tb was selectively oxidized to form Tb2O3 at the surface of the a -TbFeCo layer. This may indicate that the interaction between FeCo and this oxide leads to (100) orientation of FeCo.
Keywords :
bonds (chemical); cobalt alloys; crystal orientation; iron alloys; magnetic tunnelling; metallic thin films; oxidation; oxygen; perpendicular magnetic anisotropy; sputter deposition; surface magnetism; terbium alloys; DC sputtering; TbFeCo; bcc-FeCo(100); chemical bonding states; crystalline orientation; magnetic tunnel junctions; oxidized surface; oxygen atoms; oxygen flow rate; perpendicular magnetic anisotropy; thin films; Atomic layer deposition; Iron; Magnetic tunneling; Sputtering; Substrates; Surface treatment; Crystalline orientation; FeCo; oxidize; perpendicular MTJ;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/TMAG.2011.2148695
Filename :
6028102
Link To Document :
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