DocumentCode
1331788
Title
Oxidation and Annealing Process: Morphological Change and Nanocontact MR in Spin Valves With FeCo–AlO
NOL Spacer
Author
Shiokawa, Y. ; Shiota, M. ; Watanabe, Yoshihiro ; Otsuka, Takayuki ; Doi, M. ; Sahashi, Masashi
Author_Institution
Dept. of Electron. Eng., Tohoku Univ., Sendai, Japan
Volume
47
Issue
10
fYear
2011
Firstpage
3470
Lastpage
3473
Abstract
We studied the formation mechanism of ferromagnetic nanocontacts (NCs) around 1-2 nm in diameter in thin AlOx nano-oxide layer (NOL) through in situ conductive atomic force microscopy (c-AFM), which is the only method suitable for measuring morphological changes in features this small. Spin valves (SVs) with Fe0.5Co0.5NCs in AlOx NOL fabricated by ion-assisted-oxidation (IAO) irradiated onto 1.3-nm-thick Al had nanocontact magnetoresistance (NCMR) characteristics with the MR ratio of 5% for 1 Ω μm2. According to measurements with c-AFM, these NCs were mostly located at the valleys between the AlOx grains or the edge of the grain. In other words, NCs were formed in the oxidation and cohesion process of Al by the IAO. Moreover, we found that the high-temperature annealing process improved the MR ratio to around 10% for 0.5 Ω μm2. The high-temperature annealing process may involve the AlOx morphological change and have led the Al atoms in NCs to migrate to AlOx by combining with oxygen as impurities. Then, the morphological changes and migration of Al caused NCs to be the low resistivity and the short length.
Keywords
aluminium compounds; annealing; atomic force microscopy; cobalt alloys; ferromagnetic materials; high-temperature effects; iron alloys; magnetic multilayers; magnetic thin films; magnetoresistance; nanofabrication; nanomagnetics; nanostructured materials; oxidation; spin valves; Fe0.5Co0.5-AlOx; annealing; c-AFM; cohesion; conductive atomic force microscopy; ferromagnetic nanocontacts; high-temperature annealing; ion-assisted-oxidation; morphological change; nanocontact magnetoresistance; nanooxide layer; resistivity; spin valves; Annealing; Atomic force microscopy; Integrated circuit modeling; Iron; Oxidation; Conductive atomic force microscopy (c-AFM); magnetoresistance; morphological change; nanocontact (NC);
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.2011.2157110
Filename
6028127
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