Title :
Measurement of Stress Anisotropy in Magnetic Thin Films by Fast Fourier Transform Method
Author :
Chuen-Lin Tien ; Tsai-Wei Lin
Author_Institution :
Inst. of Electr. Eng., Feng Chia Univ., Taichung, Taiwan
Abstract :
This paper presents a novel method for measuring anisotropic stress in magnetic thin films. The proposed measuring method is based on a fast Fourier transform and optical interferometry. The anisotropic stresses in thin iron films are found to be more tensile in the edge area than in the center area, and more compressive in the tangential direction than in the radial direction.
Keywords :
compressive strength; fast Fourier transforms; iron; light interferometry; magnetic anisotropy; magnetic thin films; metallic thin films; stress measurement; tensile strength; Fe; compressive strength; fast Fourier transform; magnetic thin films; optical interferometry; stress anisotropy measurement; tangential direction; tensile strength; thin iron films; Iron; Residual stresses; Strain; Stress measurement; Substrates; Surface treatment; Anisotropic stress; fast Fourier transform; optical interferometry; thin film;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2011.2152376
