Title :
Computational Characterization of a Photonic Crystal Cantilever Sensor Using a Hexagonal Dual-Nanoring-Based Channel Drop Filter
Author :
Li, Bo ; Hsiao, Fu-Li ; Lee, Chengkuo
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
fDate :
7/1/2011 12:00:00 AM
Abstract :
We investigated photonic crystal-based dual-nanoring (DNR) channel drop filters for nanomechanical sensor applications. The backward drop mechanism is explained by a proposed model. A resonant peak at 1553.6 nm with a quality factor better than 3800 is observed at the backward drop port. When this DNR is integrated at the junction between the silicon cantilever and the substrate, the deformation of the silicon cantilever can be detected in terms of the resonant wavelength and resonant wavelength shift. The derived minimum detectable force is 37 nN.
Keywords :
Q-factor; cantilevers; deformation; elemental semiconductors; nanophotonics; nanosensors; optical filters; optical resonators; optical sensors; photonic crystals; silicon; Si; backward drop mechanism; deformation; hexagonal dual nanoring channel drop filters; nanomechanical sensor; photonic crystal cantilever sensor; quality factor; resonant wavelength; resonant wavelength shift; Force; Lattices; Optical filters; Optical resonators; Resonator filters; Silicon; Strain; Filter; photonic crystal (PhC); resonator; sensor;
Journal_Title :
Nanotechnology, IEEE Transactions on
DOI :
10.1109/TNANO.2010.2079942