Title :
Calculation of silicon antireflective microstructures for mid-infrared applications
Author :
Song, Y.M. ; Chang, K.S.
Author_Institution :
Dept. of Electron. Eng., Pusan Nat. Univ., Busan, South Korea
Abstract :
Diffraction efficiencies of antireflective microstructures (AMSs) were calculated using a rigorous coupled wave analysis (RCWA) method for mid-infrared applications. The results show the effect of height, period, and shape of AMSs on the reflection. We also discuss optimum geometry of AMSs for mid-infrared application.
Keywords :
antireflection coatings; elemental semiconductors; light diffraction; light reflection; micro-optics; silicon; AMS height; AMS period; AMS shape; RCWA; Si; diffraction efficiencies; lgiht reflection; mid-infrared applications; rigorous coupled wave analysis; silicon antireflective microstructures; Broadband communication; Fabrication; Geometry; Microstructure; Reflectivity; Silicon; Substrates;
Conference_Titel :
Numerical Simulation of Optoelectronic Devices (NUSOD), 2014 14th International Conference on
Conference_Location :
Palma de Mallorca
Print_ISBN :
978-1-4799-3681-6
DOI :
10.1109/NUSOD.2014.6935342
