Title :
Soft Magnetic Co-(TiN) Composite Films Realized within a Wide-Range of Cobalt Content
Author :
Yiwen Zhang ; Ohnuma, Shigehiro ; Masumoto, Hiroshi
Author_Institution :
Center for Interdiscipl. Res., Tohoku Univ., Sendai, Japan
Abstract :
The effect of Co content on the magnetic properties has been systematically investigated, to obtain high frequency soft magnetic Cox-(TiN)1-x films. The films with Co content more than 73 at.% are perpendicular magnetic, and the films with Co content less than 45 at.% are both soft and super-para magnetic. In a wide-range of Co content (x=45-73 at.%), the Cox-(TiN)1-x nanogranular films show good soft magnetic properties, with coercivity as low as 4 Oe and magnetization around 6-12 kG. The permeability of the films is as high as about 400 and the resonance frequency is around 1 GHz. The films exhibit good thermal stability with the low coercivity of about 5 Oe even after the annealing at 500°C, which is very important in viewpoint of application like a CMOS-compatible fabrication technology.
Keywords :
cobalt; coercive force; high-frequency effects; magnetic annealing; magnetic permeability; magnetic thin films; nanocomposites; nanomagnetics; soft magnetic materials; superparamagnetism; thermal stability; titanium compounds; Cox-(TiN)1-x; annealing; cobalt; coercivity; high frequency soft magnetic composite films; magnetic properties; magnetization; nanogranular films; permeability; resonance frequency; superparamagnetic material; temperature 500 degC; thermal stability; Magnetic properties; Magnetic resonance; Perpendicular magnetic anisotropy; Saturation magnetization; Soft magnetic materials; Thermal stability; Co-based films; TiN matrix; gigahertz frequency; high permeability; soft magnetic materials; thermal stability;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2011.2156763
