Title :
3D-simulation and characterization of subwavelength grating waveguides in SOI
Author :
Fohn, Thomas ; Hoppe, Niklas ; Vogel, Wolfgang ; Schmidt, Martin ; Rosa, Maria Felix ; Berroth, Manfred ; Butschke, Jorg ; Letzkus, Florian
Author_Institution :
Inst. of Electr. & Opt. Commun. Eng., Univ. of Stuttgart, Stuttgart, Germany
Abstract :
Spectral properties of silicon subwavelength grating waveguides are simulated in 3D with eigenmode expansion and the impact of the number of included modes is investigated. Simulation results are validated against measurements.
Keywords :
diffraction gratings; eigenvalues and eigenfunctions; integrated optics; optical waveguides; silicon-on-insulator; 3D simulation; SOI; eigenmode expansion; optical modes; silicon-on-insulator; subwavelength grating waveguides;
Conference_Titel :
Numerical Simulation of Optoelectronic Devices (NUSOD), 2014 14th International Conference on
Conference_Location :
Palma de Mallorca
Print_ISBN :
978-1-4799-3681-6
DOI :
10.1109/NUSOD.2014.6935394
