Title :
A CMOS Digitized Silicon Condenser Microphone for Acoustic Applications
Author :
Chiang, Cheng-Ta ; Wu, Chia-Yu
Author_Institution :
Dept. of Electr. Eng., Nat. Chia-Yi Univ., Chiayi, Taiwan
Abstract :
In this paper, a CMOS digitized silicon condenser microphone for acoustic applications is newly proposed. The proposed CMOS digitized silicon condenser microphone is attractive due to the fact that the sensor and all the circuits are robustly and compactly integrated. Another innovation of this proposed CMOS digitized silicon condenser microphone is that it could be operated without charge pump circuits. Thus, the sensor and circuits can be performed at the same power supply. Based upon 0.35 μ m 2P4M CMOS technology with 3 V power supply, measurement results have successfully verified the correct function and performance of the proposed CMOS digitized silicon condenser microphone. The area of the proposed CMOS digitized silicon condenser microphone is 1444 × 1383 μm2 and the FOM of the sigma-delta modulator is 163.85 dB. The proposed CMOS digitized silicon condenser microphone is suitable for mobile phones, laptops, PDAs, and hearing aids, etc.
Keywords :
CMOS digital integrated circuits; elemental semiconductors; microphones; modulators; sigma-delta modulation; silicon; 2P4M CMOS technology; CMOS digitized silicon condenser microphone; Si; acoustic sensor; integrated circuits; noise figure 163.85 dB; sigma-delta modulator; size 0.35 mum; voltage 3 V; CMOS integrated circuits; CMOS technology; Charge pumps; Impedance; Microphones; Power supplies; Silicon; CMOS; Capacitive sensor; sensor interface; sensor transducer; silicon condenser microphone;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2010.2071380
