A method for calibrating the line-focus-beam acoustic microscopy system

Author

Kushibiki, Jun-ichi ; Arakawa, Mototaka

Author_Institution

Dept. of Electr. Eng., Tohoku Univ., Sendai, Japan

Volume

45

Issue

2

fYear

1998

fDate

3/1/1998 12:00:00 AM

Firstpage

421

Lastpage

430

Abstract

Absolute accuracy of the line-focus-beam (LFB) acoustic microscopy system is investigated for measurements of the leaky surface acoustic wave (LSAW) velocity and attenuation, and a method of system calibration is proposed. In order to discuss the accuracy, it is necessary to introduce a standard specimen whose bulk acoustic properties, (e.g., the independent elastic constants and density) are measured with high accuracy. Single crystal substrates of gadolinium gallium garnet (GGG) are taken as standard specimens. The LSAW propagation characteristics are measured and compared with the calculated results using the measured bulk acoustic properties. Calibration is demonstrated for the system using two LFB acoustic lens devices with a cylindrical concave surface of 1-mm radius in the frequency range 100 to 300 MHz.

Keywords

acoustic microscopy; acoustic wave velocity measurement; calibration; surface acoustic waves; 100 to 300 MHz; GGG single crystal substrate; GdGG; GdGa5O12; LFB acoustic lens; LSAW propagation; attenuation measurement; calibration; density; elastic constant; leaky surface acoustic wave; line-focus-beam acoustic microscopy; standard specimen; velocity measurement; Acoustic devices; Acoustic measurements; Acoustic waves; Attenuation measurement; Calibration; Density measurement; Measurement standards; Microscopy; Surface acoustic waves; Velocity measurement;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/58.660152

Filename

660152