DocumentCode :
1338069
Title :
Optical Performance of Bragg Gratings Fabricated in Ti:LiNbO 
Waveguides by Focused Ion Beam Milling
Author :
Ghoumid, Kamal ; Ferriere, Richard ; Benkelfat, Badr-Eddine ; Guizal, Brahim ; Gharbi, Tijani
Author_Institution :
Femto-ST Dept. d´´Opt. P.M. Duffieux (LOPMD), Univ. de Franche-Comte, Besançon, France
Volume :
28
Issue :
23
fYear :
2010
Firstpage :
3488
Lastpage :
3493
Abstract :
In this paper we propose an efficient technique for micromachining lithium niobate that is used in Ti-diffused waveguides. The use of Focused Ion Beam (FIB) etching allows obtaining homogeneous periodic microstructures. Bragg gratings with a period of 1.05 μm and an aspect ratio of 6:1 (depth-to-half period ratio) have been achieved. A reflectivity greater than 95 % associated with a bandwidth at half maximum of about 100 nm within a window centered at 1550 nm, is demonstrated for a Bragg grating of period Λ = 1.8 μm and a length of 144 μm, in good agreement with theoretical predictions.
Keywords :
Bragg gratings; focused ion beam technology; integrated optics; lithium compounds; micro-optics; micromachining; milling; optical fabrication; optical waveguide components; optical waveguides; optical windows; reflectivity; sputter etching; titanium; Bragg gratings; FIB etching; LiNbO3:Ti; focused ion beam milling; homogeneous periodic microstructures; integrated optics; micromachining; optical fabrication; optical waveguides; optical window; reflectivity; size 144 mum; wavelength 1550 nm; Bandwidth; Bragg gratings; Etching; Milling; Optical device fabrication; Optical waveguides; Ultrafast optics; Bragg grating; focused ion beam; integrated optics; lithium niobate; waveguide;
fLanguage :
English
Journal_Title :
Lightwave Technology, Journal of
Publisher :
ieee
ISSN :
0733-8724
Type :
jour
DOI :
10.1109/JLT.2010.2080258
Filename :
5587871
Link To Document :
