• DocumentCode
    1338310
  • Title

    Special Issue on HiPIMS and High Power Glow Discharge

  • Author

    Yukimura, Ken ; Ehiasarian, A. P.

  • Author_Institution
    National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan
  • Volume
    38
  • Issue
    11
  • fYear
    2010
  • Firstpage
    3005
  • Lastpage
    3006
  • Abstract
    This special issue focuses on high-power impulse magnetron sputtering (HiPIMS) technology. Twelve papers are included in this special issue.
  • Keywords
    Glow discharges; Magnetrons; Special issues and sections; Sputtering;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2010.2073131
  • Filename
    5587904
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1338310