Title :
Special Issue on HiPIMS and High Power Glow Discharge
Author :
Yukimura, Ken ; Ehiasarian, A. P.
Author_Institution :
National Institute of Advanced Industrial Science and Technology, Tsukuba, Japan
Abstract :
This special issue focuses on high-power impulse magnetron sputtering (HiPIMS) technology. Twelve papers are included in this special issue.
Keywords :
Glow discharges; Magnetrons; Special issues and sections; Sputtering;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2010.2073131
