Title :
Programming characteristics of p-channel Si nano-crystal memory
Author :
Han, Kwangseok ; Kim, Ilgweon ; Shin, Hyungcheol
Author_Institution :
Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea
fDate :
6/1/2000 12:00:00 AM
Abstract :
In this work, the programming characteristics of a p-channel nano-crystal memory is studied. The hole tunneling component from the inversion layer and the electron tunneling component from the valence band in the nano-crystal were separated successfully by independent measurement of the current at the body terminal and at the source/drain terminal of the memory. For small gate voltage, the hole tunneling current is dominant during programming. However, for large programming voltage, the valence band electron tunneling from the dot into the substrate becomes dominant. Finally, the comparison of retention characteristics between programmed holes and electrons shows that holes have longer retention time.
Keywords :
MOS capacitors; PLD programming; inversion layers; nanostructured materials; semiconductor device measurement; semiconductor storage; silicon; tunnelling; valence bands; MOS capacitor; Si-SiO/sub 2/; body terminal; current measurement; dot formation; electron tunneling component; hole tunneling component; inversion layer; large programming voltage; nonvolatile memory; p-channel Si nano-crystal memory; programming characteristics; retention characteristics; retention time; source/drain terminal; valence band; Charge carrier processes; Current measurement; Dielectrics; Electrons; Flash memory; Low voltage; Nanocrystals; Nonvolatile memory; Scalability; Tunneling;
Journal_Title :
Electron Device Letters, IEEE