DocumentCode
1339447
Title
A 60 Ghz Scanning Near-Field Microscope With High Spatial Resolution Sub-Surface Imaging
Author
Haddadi, K. ; Glay, D. ; Lasri, T.
Author_Institution
Inst. d´´Electron., USTL, Villeneuve d´´Ascq, France
Volume
21
Issue
11
fYear
2011
Firstpage
625
Lastpage
627
Abstract
We report a 60 GHz (λ = 5 mm) near-field scanning microscope for surface and sub-surface imaging. The sensing evanescent millimeter-wave probe is made of an alumina microstrip line tapered to 7 μm (~ λ/700) to achieve high spatial resolution. The scanning probe microscopy platform provides amplitude and phase-shift mappings of the reflection coefficient. Our microscope demonstrates the ability to achieve subsurface microscale-resolution images of buried structures.
Keywords
alumina; microstrip lines; near-field scanning optical microscopy; reflection; alumina microstrip line; frequency 60 GHz; high spatial resolution subsurface imaging; phase-shift mappings; reflection coefficient; scanning near-field microscope; sensing evanescent millimeter-wave probe; subsurface microscale-resolution images; Microscopy; Microstrip; Millimeter wave measurements; Millimeter wave technology; Probes; Spatial resolution; Evanescent waves; near-field millimeter-wave microscopy; spatial resolution;
fLanguage
English
Journal_Title
Microwave and Wireless Components Letters, IEEE
Publisher
ieee
ISSN
1531-1309
Type
jour
DOI
10.1109/LMWC.2011.2167744
Filename
6034539
Link To Document