DocumentCode :
1339698
Title :
High-purity thin films
Volume :
3
Issue :
5
fYear :
1966
fDate :
5/1/1966 12:00:00 AM
Firstpage :
6
Lastpage :
6
Keywords :
Atmosphere; Contamination; Electronic circuits; Gettering; Laboratories; Sputtering; Telephony; Thin film circuits; Transistors; Vacuum systems;
fLanguage :
English
Journal_Title :
Spectrum, IEEE
Publisher :
ieee
ISSN :
0018-9235
Type :
jour
DOI :
10.1109/MSPEC.1966.5219616
Filename :
5219616
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1339698
