DocumentCode :
1340063
Title :
Mechanical radio
Author :
Nguyen, Clark T.-C
Volume :
46
Issue :
12
fYear :
2009
Firstpage :
30
Lastpage :
35
Abstract :
Micromechanical resonators are often fabricated from silicon, using techniques similar to those employed in making microelectronic circuits. Perhaps the simplest resonator that can be made this way is a beam fixed at both ends and excited using an electrode placed under the freely suspended middle portion. Oscillatory signals applied to this electrode induce vibrations in the beam.
Keywords :
elemental semiconductors; integrated circuits; micromechanical resonators; silicon; mechanical radio; microelectronic circuits; micromechanical resonators; Cognitive radio; Film bulk acoustic resonators; Micromechanical devices; Roads; Surface acoustic waves; TV; Telecommunications;
fLanguage :
English
Journal_Title :
Spectrum, IEEE
Publisher :
ieee
ISSN :
0018-9235
Type :
jour
DOI :
10.1109/MSPEC.2009.5340247
Filename :
5340247
Link To Document :
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