Title :
High-Δn silica-on-silicon channel waveguides based on sol-gel germanophosphosilicate glass
Author :
Syms, R.R.A. ; Schneider, V.M. ; Huang, W. ; Ahmad, M.M.
Author_Institution :
Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK
fDate :
7/3/1997 12:00:00 AM
Abstract :
A process for fabrication of high-Δn silica-on-silicon channel waveguides by spin-coating and rapid thermal annealing of sol-gel germanophosphosilicate glass is described. A recipe for the preparation of stable sols and a parameter range for deposition of crack-free films are given. Low and spectrally flat insertion loss is demonstrated for singlemode guides with a Δn of 1.5×10-2
Keywords :
germanate glasses; optical fabrication; optical films; optical glass; optical waveguides; phosphosilicate glasses; rapid thermal annealing; sol-gel processing; GeO2-P2O5-SiO2; SiO2-Si; fabrication; film; insertion loss; rapid thermal annealing; refractive index difference; silica-on-silicon channel waveguide; single mode guide; sol-gel germanophosphosilicate glass; spin coating;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19970851
