Quick-turnaround-time improvement for product development and transfer to mass production

Author

Koike, Hidetoshi ; Matsuoka, Fumitomo ; Hohkibara, Shinichi ; Fukuda, Etsuo ; Tomioka, Kazuhiro ; Miyajima, Hideshi ; Muraoka, Kouichi ; Hayasaka, Nobuo ; Kimura, Minoru

Author_Institution

Microelectron. Eng. Lab., Toshiba Corp., Yokohama, Japan

Volume

11

Issue

1

fYear

1998

fDate

2/1/1998 12:00:00 AM

Firstpage

54

Lastpage

62

Abstract

We describe equipment and facility operational methods in a production fab which are designed to achieve quick-turnaround-time (QTAT) manufacturing and ease product transfer from development to mass production. An advanced CIM system with precise lot management is introduced to keep the optimum balance of manufacturing TAT and throughput. Substantial end-user computing reduces the engineering holding time for handling development lots. In situ monitoring technologies are applied for the utilization enhancement of plasma-assisted equipment. A 9% manufacturing TAT reduction and a 14% throughput increase are estimated using a manufacturing simulator. The number of wafers in QTAT lots is reduced for processing time reduction. As a result, manufacturing TAT of QTAT lots with reduction from 24 wafers to three is reduced to 56% compared with that of normal lots in the production fab. This new production fab realizes QTAT development and agile product transfer from development to mass production with full process compatibility

Keywords

computer integrated manufacturing; integrated circuit manufacture; manufacturing data processing; monitoring; planning; product development; production control; production engineering computing; CIM system; QTAT manufacturing; in situ monitoring technologies; manufacturing simulator; mass production; plasma-assisted equipment; precise lot management; process compatibility; processing time reduction; product development; production fab; quick-turnaround-time manufacturing; utilization enhancement; Computer integrated manufacturing; Costs; Large scale integration; Manufacturing processes; Mass production; Monitoring; Product development; Pulp manufacturing; Throughput; Virtual manufacturing;

fLanguage

English

Journal_Title

Semiconductor Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/66.661285

Filename

661285