DocumentCode
1342291
Title
Silicon-micromachined scanning confocal optical microscope
Author
Dickensheets, David L. ; Kino, Gordon S.
Author_Institution
Edward L. Ginzton Lab., Stanford Univ., CA, USA
Volume
7
Issue
1
fYear
1998
fDate
3/1/1998 12:00:00 AM
Firstpage
38
Lastpage
47
Abstract
We describe a miniature scanning confocal optical microscope constructed from components micromachined using silicon and fused silica. The design, fabrication, and characterization of the components of the microscope as well as the assembly of the system are described. Sample images acquired using the instrument are also presented
Keywords
elemental semiconductors; micromachining; optical fabrication; optical microscopes; silicon; Si; assembly; design; fabrication; fused silica; imaging instrument; silicon micromachined scanning confocal optical microscope; Biomedical optical imaging; Lenses; Mirrors; Optical devices; Optical fiber devices; Optical fibers; Optical imaging; Optical microscopy; Optical refraction; Silicon;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/84.661382
Filename
661382
Link To Document