Title :
Microelectromechanical vibration sensor with optical interconnects
Author :
Peiner, Erwin ; Scholz, Dirk ; Fricke, Klaus ; Schlachetzki, Andreas ; Hauptmann, Peter
Author_Institution :
Inst. fur Halbleitertech., Tech. Univ. Carolo-Wilhelmina, Braunschweig, Germany
fDate :
3/1/1998 12:00:00 AM
Abstract :
A resonant vibration sensor realized using silicon micromachining for wear monitoring of rotating machinery is described. It comprises a mechanical resonator, piezoresistive bridge, and components for fiber-optical signal readout by an infrared light-emitting diode. The performance of the microsystem is demonstrated by its static and dynamical behavior. The results confirm that the described sensor has the potential for on-line vibration control of rotating machinery operated under the conditions of industrial production
Keywords :
machine testing; micromachining; micromechanical resonators; microsensors; optical interconnections; piezoresistive devices; vibration measurement; wear testing; Si; fiber-optical signal readout; industrial production; infrared light emitting diode; mechanical resonator; microelectromechanical vibration sensor; on-line vibration control; optical interconnect; piezoresistive bridge; rotating machinery; silicon micromachining; wear monitoring; Machinery; Mechanical sensors; Micromachining; Optical interconnections; Optical sensors; Resonance; Sensor phenomena and characterization; Silicon; Vibrations; Wearable sensors;
Journal_Title :
Microelectromechanical Systems, Journal of
