An electrostatic lower stator axial-gap polysilicon wobble motor. I. Design and modeling

Author

Legtenberg, Rob ; Berenschot, Erwin ; van Baar, John ; Elwenspoek, Miko

Author_Institution

MESA Res. Inst., Twente Univ., Enschede, Netherlands

Volume

7

Issue

1

fYear

1998

fDate

3/1/1998 12:00:00 AM

Firstpage

79

Lastpage

86

Abstract

This paper presents design issues and a theoretical model of electrostatically driven axial-gap polysilicon wobble motors. The motor design benefits from large axial rotor-to-stator overlap and large gear ratios, and motor designs with rotor radii of 50 and 100 μm are capable of generating torques in the nanoNewtonmeter range at high electrostatic fields. Because of the large gear ratio, smaller angular steps and lower rotational speed are obtained, compared to radial-gap motor designs. Aspects like gear ratio, torque generation, excitation schemes and torque coverage, normal forces, friction, rotor kinetics, and dynamical behavior are addressed. The motor design is compliant to the integration of gear linkages with respect to mechanical power transmission

Keywords

electrostatic devices; elemental semiconductors; micromotors; semiconductor device models; silicon; torque; 100 micron; 50 micron; Si; angular steps; axial rotor-to-stator overlap; axial-gap polysilicon wobble motor; dynamical behavior; electrostatic fields; electrostatic lower stator; excitation schemes; gear linkages; gear ratio; gear ratios; mechanical power transmission; motor designs; rotational speed; rotor kinetics; rotor radii; torque coverage; torque generation; torques; Couplings; Electrostatics; Friction; Gears; Kinetic theory; Mechanical power transmission; Micromotors; Rotors; Stators; Torque;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.661387

Filename

661387