An electrostatic lower stator axial-gap polysilicon wobble motor. II. Fabrication and performance

Author

Legtenberg, Rob ; Berenschot, Erwin ; van Baar, John ; Elwenspoek, Miko

Author_Institution

MESA Res. Inst., Twente Univ., Enschede, Netherlands

Volume

7

Issue

1

fYear

1998

fDate

3/1/1998 12:00:00 AM

Firstpage

87

Lastpage

93

Abstract

For pt. I see ibid., vol. 7, no. 1, p. 79-86 (1998). This paper presents the fabrication and first performance characteristics of electrostatically driven axial-gap polysilicon wobble motors. The fabrication is based on a four mask process using polysilicon surface-micromachining techniques. Three twelve-stator-pole wobble motor designs have been realized with rotor radii of 50 and 100 μm. Motors have been operated successfully at driving voltages as low as 6 V at speeds up to 150 rpm. The motor performance is characterized by gear ratio measurements and measuring starting and stopping voltages. Motor lifetimes of several million wobble cycles, comparable to operating times of several hours, have been obtained

Keywords

electrostatic devices; elemental semiconductors; masks; micromachining; micromotors; silicon; stators; 100 micron; 50 micron; 6 V; Si; axial-gap polysilicon wobble motor; driving voltages; electrostatic lower stator; four mask process; gear ratio measurements; motor lifetimes; performance characteristics; rotor radii; starting voltages; stopping voltages; surface-micromachining techniques; Electrostatic measurements; Fabrication; Gears; Helium; Low voltage; Micromotors; Rotors; Stators; Torque; Transistors;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.661388

Filename

661388