5th International Symposium on Semiconductor Manufacturing (ISSM´96)
Volume :
11
Issue :
1
fYear :
1998
fDate :
2/1/1998 12:00:00 AM
Abstract :
The following topics were dealt with: fab design and management, information systems, defect reduction and yield enhancement, ultra clean technology, equipment/process optimization and innovation, and environmental issues
Keywords :
semiconductor device manufacture; defect reduction; environmental issues; equipment optimization; fab design; fab management; information systems; process optimization; semiconductor manufacturing; ultra clean technology; yield enhancement;
