Autonomous Robotic Pick-and-Place of Microobjects

This paper presents a robotic system that is capable of both picking up and releasing microobjects with high accuracy, reliability, and speed. Due to force-scaling laws, large adhesion forces at the microscale make rapid, accurate release of microobjects a long-standing challenge in micromanipulation, thus representing a hurdle toward automated robotic pick-and-place of micrometer-sized objects. The system employs a novel microelectromechanical systems (MEMS) microgripper with a controllable plunging structure to impact a microobject that gains sufficient momentum to overcome adhesion forces. The performance was experimentally quantified through the manipulation of 7.5-10.9 ??m borosilicate glass spheres in an ambient environment. Experimental results demonstrate that the system, for the first time, achieves a 100% success rate in release (which is based on 700 trials) and a release accuracy of 0.45 ?? 0.24 ??m. High-speed, automated microrobotic pick-and-place was realized by visually recognizing the microgripper and microspheres, by visually detecting the contact of the microgripper with the substrate, and by vision-based control. Example patterns were constructed through automated microrobotic pick-and-place of microspheres, achieving a speed of 6 s/sphere, which is an order of magnitude faster than the highest speed that has been reported in the literature.