Performance of a double-sided silicon microstrip detector with a wide-pitch n-side readout using a field-plate and a multi p-stop structure

Author

Saitoh, Y. ; Akamine, T. ; Inoue, M. ; Yamanaka, J. ; Echigo, N. ; Miyahara, S. ; Kamiya, M. ; Ikeda, H. ; Matsuda, T. ; Bozek, A. ; Haba, J. ; Koike, S. ; Ozaki, H. ; Tanaka, M. ; Iwasaki, H. ; Higashi, Y. ; Tsuboyama, T. ; Yamada, Y. ; Banas, E. ; Natka

Author_Institution

Seiko Instrum. Inc., Chiba, Japan

Volume

44

Issue

3

fYear

1997

fDate

6/1/1997 12:00:00 AM

Firstpage

622

Lastpage

628

Abstract

The previous double-sided silicon microstrip detector (DSSDs) prototype with integrated coupling capacitors formed by oxide-nitride-oxide (ONO) dielectric film showed band-to-band tunneling (BET) current at the field-plate structure for the N⁺ strip, which represented a limitation of the biasing configuration. We report improved characteristics of the modified field-plate structure and the wide-pitch n-side readout using a multi p-stop structure combined thereon

Keywords

position sensitive particle detectors; silicon radiation detectors; N⁺ strip; Si; band-band tunneling current; biasing configuration; double-sided microstrip detector performance; field-plate; integrated coupling capacitors; multi p-stop structure; oxide-nitride-oxide dielectric film; wide-pitch n-side readout; Capacitance; Capacitors; Decision support systems; Detectors; Dielectric films; Electrodes; Microstrip; Physics; Silicon; Strips;

fLanguage

English

Journal_Title

Nuclear Science, IEEE Transactions on

Publisher

ieee

ISSN

0018-9499

Type

jour

DOI

10.1109/23.603722

Filename

603722