Computer-aided generation of nonlinear reduced-order dynamic macromodels. II. Stress-stiffened case

Author

Mehner, Jan E. ; Gabbay, Lynn D. ; Senturia, Stephen D.

Volume

9

Issue

2

fYear

2000

fDate

6/1/2000 12:00:00 AM

Firstpage

270

Lastpage

278

Abstract

For pt. I see ibid., vol. 9, no. 2, p. 262-9 (2000). Reduced-order dynamic macromodels to describe the behavior of microelectromechanical system structures with stress stiffening are presented in this paper. The approach is based on potential and kinetic energy representations of selected fundamental modes of motion, modified to take account of stress stiffening. Energy data are calculated by several finite-element runs, fitted to polynomial functions, and used to develop the equations of motion according to Lagrangian mechanics. The accuracy and restrictions of these macromodels are shown.

Keywords

CAD; electronic engineering computing; electrostatic actuators; finite element analysis; internal stresses; mechanical engineering computing; micromechanical devices; modelling; vibrations; Lagrangian mechanics; MEMS system structures; computer-aided generation; finite-element runs; fundamental motion modes; kinetic energy representations; microelectromechanical system; nonlinear reduced-order dynamic macromodels; polynomial functions; potential energy representations; stress-stiffened case; Analytical models; Chemical technology; Computer aided software engineering; Finite element methods; Laboratories; Microelectromechanical systems; Nonlinear dynamical systems; Nonlinear systems; Potential energy; Stress;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.846708

Filename

846708