Title :
Micromachined micropackaged filter banks
Author :
Brown, Andrew R. ; Rebeiz, Gabriel M.
Author_Institution :
Radiation Lab., Michigan Univ., Ann Arbor, MI, USA
fDate :
4/1/1998 12:00:00 AM
Abstract :
A micromachined, micropackaged filter bank at X/Ku-band is presented. The filters are integrated on a silicon substrate, and the micropackaging provides high isolation between the adjacent filters in the overlapping frequency region. This technology allows for the low-cost integration of switched filter banks on the same substrate for satellite communication systems, base-stations, and wide-band radar applications
Keywords :
cavity resonators; micromachining; microwave filters; packaging; passive filters; resonator filters; silicon; switched filters; Ku-band; SHF; Si; Si substrate; X-band; base-stations applications; filter cavities; high isolation; micromachined filter banks; micropackaged filter banks; satellite communication systems; switched filter banks; wideband radar applications; Biomembranes; Channel bank filters; Costs; Dielectric substrates; Filter bank; Isolation technology; Micromachining; P-i-n diodes; Packaging; Silicon;
Journal_Title :
Microwave and Guided Wave Letters, IEEE
