• DocumentCode
    1347316
  • Title

    An Optofluidic Concept for a Tunable Micro-iris

  • Author

    Müller, Philipp ; Spengler, Nils ; Zappe, Hans ; Mönch, Wolfgang

  • Author_Institution
    Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg, Germany
  • Volume
    19
  • Issue
    6
  • fYear
    2010
  • Firstpage
    1477
  • Lastpage
    1484
  • Abstract
    A tunable aperture stop based on optofluidic technology, which overcomes a number of limitations of comparable micromechanical alternatives, is presented. Relying on the high optical absorption of aqueous pigment dispersions, we demonstrate that optical stops of high contrast may be defined without the need for any movable parts. The highly flexible design is based on photolithographic patterning of dry film resist and allows control of laminar flow in microfluidic chambers exclusively by capillary forces. The functionality of the developed device is shown in transmission measurements and by application of the iris in a basic imaging setup.
  • Keywords
    laminar flow; micro-optomechanical devices; microfluidics; photolithography; photoresists; aqueous pigment dispersions; capillary forces; dry film resist; high optical absorption; laminar flow; microfluidic chambers; optofluidic technology; photolithographic patterning; transmission measurements; tunable aperture stop; tunable microiris; Apertures; Fabrication; Iris; Microfluidics; Microoptics; Apertures; capillary forces; micro-optics; microfluidics; optofluidics;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2010.2079917
  • Filename
    5599272