DocumentCode
1347316
Title
An Optofluidic Concept for a Tunable Micro-iris
Author
Müller, Philipp ; Spengler, Nils ; Zappe, Hans ; Mönch, Wolfgang
Author_Institution
Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg, Germany
Volume
19
Issue
6
fYear
2010
Firstpage
1477
Lastpage
1484
Abstract
A tunable aperture stop based on optofluidic technology, which overcomes a number of limitations of comparable micromechanical alternatives, is presented. Relying on the high optical absorption of aqueous pigment dispersions, we demonstrate that optical stops of high contrast may be defined without the need for any movable parts. The highly flexible design is based on photolithographic patterning of dry film resist and allows control of laminar flow in microfluidic chambers exclusively by capillary forces. The functionality of the developed device is shown in transmission measurements and by application of the iris in a basic imaging setup.
Keywords
laminar flow; micro-optomechanical devices; microfluidics; photolithography; photoresists; aqueous pigment dispersions; capillary forces; dry film resist; high optical absorption; laminar flow; microfluidic chambers; optofluidic technology; photolithographic patterning; transmission measurements; tunable aperture stop; tunable microiris; Apertures; Fabrication; Iris; Microfluidics; Microoptics; Apertures; capillary forces; micro-optics; microfluidics; optofluidics;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2010.2079917
Filename
5599272
Link To Document