DocumentCode
1350748
Title
High-sensitivity photodetectors with on-chip pinhole for laser scanning microscopy
Author
Zappa, Franco ; Ghioni, Massimo ; Zappa, Rita ; Drodofsky, Ulrich
Author_Institution
Politecnico di Milano, Italy
Volume
47
Issue
7
fYear
2000
fDate
7/1/2000 12:00:00 AM
Firstpage
1472
Lastpage
1476
Abstract
We manufactured new high-sensitivity solid-state detectors, specifically designed for measurements in laser scanning microscopy (LSM). These single-photon avalanche diodes (SPAD´s) improve the performance achievable with an LSM apparatus in the optical inspection of microelectronic devices and circuits. Innovative detector structures that incorporate an on-chip pinhole filter are presented. Experimental measurements show that SPAD´s perform better than standard photomultiplier tubes
Keywords
avalanche photodiodes; inspection; integrated circuit manufacture; integrated circuit measurement; measurement by laser beam; microscopy; photodetectors; high-sensitivity photodetectors; laser scanning microscopy; microelectronic circuits; microelectronic devices; on-chip pinhole filter; optical inspection; single-photon avalanche diodes; solid-state detectors; Diodes; Inspection; Manufacturing; Microscopy; Optical design; Optical devices; Optical filters; Photodetectors; Solid lasers; Solid state circuits;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.848295
Filename
848295
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