Title :
A Novel MEMS Respiratory Flow Sensor
Author :
Wei, Chia-Ling ; Lin, Chien-Fu ; Tseng, I-Ta
Author_Institution :
Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan
Abstract :
A novel CMOS-process-compatible MEMS sensor for monitoring respiration is presented. This resistive flow sensor was manufactured by the TSMC 0.35 ¿m CMOS/MEMS mixed-signal 2P4M polycide process. The sensor was demonstrated to be sensitive enough to detect the respiratory flow rate, and the relationship between flow rate and sensed voltage is quite linear. If one can integrate the sensor with its sensing circuit into a single chip, the cost of a pneumotach system can be greatly reduced. Moreover, the proposed sensor is useful in both invasive and noninvasive applications.
Keywords :
CMOS integrated circuits; bioMEMS; flow sensors; patient monitoring; pneumodynamics; CMOS-process-compatible MEMS sensor; MEMS respiratory flow sensor; TSMC CMOS; invasive application; mixed-signal 2P4M polycide process; noninvasive application; pneumotach system; respiration monitoring; sensing circuit; size 0.35 mum; CMOS process; Circuits; Costs; Force sensors; Impedance measurement; Manufacturing processes; Micromechanical devices; Patient monitoring; Sensor systems; Temperature sensors; CMOS/MEMS; flow sensor; respiratory monitoring;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2009.2035192
