Frequency Stability of RF-MEMS Disk Resonators

Author

Quan Yuan ; Wei Luo ; Hui Zhao ; Bohua Peng ; Jinling Yang ; Fuhua Yang

Author_Institution

State Key Lab. of Transducer Technol., Inst. of Semicond., Beijing, China

Volume

62

Issue

5

fYear

2015

fDate

May-15

Firstpage

1603

Lastpage

1608

Abstract

This paper systematically investigates the frequency stability of a radial-contour-mode micromechanical disk resonators with high quality factor (Q-factor) and high resonance frequency. Microelectromechanical system (MEMS)-based oscillator prototype consisting of the resonator and off-chip circuit is realized for frequency reference. The sustaining circuit is designed using impedance matching networks and two op-amp stages with automatic gain control circuit. The oscillator reaches a short-term frequency stability of ±1 ppm and a medium-term frequency stability of ±5 ppm over industrial temperature range (-40 °C-85 °C), which outperforms some of the best MEMS oscillators. Meanwhile, the phase noise is -95 dBc/Hz at 10 kHz offset and 149-MHz carrier. This paper also presents a simple and effective compensation scheme by combining built-in microoven and bias voltage tuning, which can achieve a frequency stability range of 2 ppm at temperature ranges from 20 °C to 100 °C.

Keywords

Q-factor; automatic gain control; frequency stability; impedance matching; micromechanical resonators; operational amplifiers; radiofrequency oscillators; MEMS-based oscillator prototype; Q-factor; RF-MEMS disk resonators; automatic gain control circuit; bias voltage tuning; built-in microoven; frequency 10 kHz; frequency 149 MHz; frequency reference; frequency stability; impedance matching networks; microelectromechanical system-based oscillator prototype; off-chip circuit; op-amp stages; quality factor; radial-contour-mode micromechanical disk resonators; resonance frequency; sustaining circuit; temperature -40 C to 85 C; temperature 20 C to 100 C; Circuit stability; Micromechanical devices; Phase noise; Resonant frequency; Temperature measurement; Thermal stability; Frequency stability; microelectromechanical system (MEMS) oscillator; phase noise; temperature compensation; temperature compensation.;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/TED.2015.2415199

Filename

7078954