DocumentCode :
1353238
Title :
Linear Arrays of Microchannel Plasmas in Monolithic 
Sheets
Author :
Kim, K.S. ; Park, S.-J. ; Eden, J.G.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Illinois, Urbana, IL, USA
Volume :
39
Issue :
11
fYear :
2011
Firstpage :
2698
Lastpage :
2699
Abstract :
Linear microplasmas have been produced within rectangular channels, 75 × 75 μm2 in cross section and 7 cm in length. Arrays of such channels have been fabricated in single sheets of 127-μm-thick aluminum foil by a photolithographic step and an electrochemical process. Arrays comprising 20 parallel channels have been operated in the rare gases, N2, and air at pressures in the 100-760-Torr interval.
Keywords :
alumina; aluminium; electrochemistry; microchannel flow; microfabrication; photolithography; plasma devices; Al-Al2O3; aluminum foil; electrochemical process; linear arrays; microchannel plasmas; monolithic sheets; photolithographic step; pressure 100 torr to 760 torr; rectangular channels; size 127 mum; size 7 cm; size 75 mum; Aluminum oxide; Electrodes; Microcavities; Microchannel; Plasma devices; Arrays; microcavity plasmas; microchannels; microplasmas;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2011.2165563
Filename :
6051520
Link To Document :
