DocumentCode
1354239
Title
CMOS compatible thermoelectric infrared sensors
Author
Sheen, Chin-Shown ; Chi, Sien
Author_Institution
Inst. of Electro-Opt. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Volume
36
Issue
13
fYear
2000
fDate
6/22/2000 12:00:00 AM
Firstpage
1117
Lastpage
1118
Abstract
A new structure for CMOS compatible thermoelectric infrared sensors is proposed. By using micro-link structures to connect several floating membranes, the largest floating membrane area yet obtained and large output voltages have been realised. The characteristics of the sensors have been measured, and are compared with those of existing devices
Keywords
CMOS integrated circuits; infrared detectors; membranes; thermoelectric devices; CMOS compatibility; floating membrane area; micro-link structures; output voltages; sensor characteristics; thermoelectric infrared sensors;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20000823
Filename
850453
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