Title :
CMOS compatible thermoelectric infrared sensors
Author :
Sheen, Chin-Shown ; Chi, Sien
Author_Institution :
Inst. of Electro-Opt. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
fDate :
6/22/2000 12:00:00 AM
Abstract :
A new structure for CMOS compatible thermoelectric infrared sensors is proposed. By using micro-link structures to connect several floating membranes, the largest floating membrane area yet obtained and large output voltages have been realised. The characteristics of the sensors have been measured, and are compared with those of existing devices
Keywords :
CMOS integrated circuits; infrared detectors; membranes; thermoelectric devices; CMOS compatibility; floating membrane area; micro-link structures; output voltages; sensor characteristics; thermoelectric infrared sensors;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20000823
