A monolithic single-crystal yttrium iron garnet/silicon X-band circulator

Production of truly monolithic microwave integrated circuits that incorporate ferrite passive control elements has been hindered by the material property mismatches between ferrites and semiconductors. In this work, monolithic Y-junction circulators were fabricated by bonding 100-μm-thick single-crystal yttrium iron garnet films to silicon at 195/spl deg/C, and then removing the gadolinium gallium garnet substrate. S-parameter measurements on the circulator and matching microstrip circuit yield an isolation of 20 dB over a 1 GHz bandwidth at 9 GHz, with a minimum insertion loss near 1 dB. Improvements in circuit design and fabrication techniques may yield monolithic circulators that are fully compatible with large-scale semiconductor manufacturing methods.