Title :
Wavelength-selectable microarray light sources of multiple ranges simultaneously fabricated on single wafer
Author :
Kudo, K. ; Morimoto, T. ; Yashiki, K. ; Sasaki, T. ; Yokoyama, Y. ; Hamamoto, K. ; Yamaguchi, M.
Author_Institution :
Optoelectron. & High Frequency Device Res. Lab., NEC Corp., Tsukuba, Japan
fDate :
4/13/2000 12:00:00 AM
Abstract :
The authors have simultaneously fabricated multi-range wavelength-selectable light-sources (WSLs) on a single wafer by using microarray selective epitaxy (MASE). Compact (1.136 mm2) WSLs, each consisting of monolithically integrated eight-stripe microarray distributed-feedback laser diodes (DFB-LDs), an 8×1 multimode-interference (MMI) optical combiner, a semiconductor optical amplifier (SOA), and an electroabsorption (EA) modulator, showed an addressable wavelength range of ~15 nm with uniform device characteristics. A 47 nm-wide wavelength range was completely covered by three simultaneously fabricated WSLs
Keywords :
distributed feedback lasers; electro-optical modulation; electroabsorption; electron beam lithography; integrated optics; laser feedback; light sources; micro-optics; optical fabrication; semiconductor laser arrays; semiconductor optical amplifiers; 47 nm; addressable wavelength range; electroabsorption modulator; fabrication; microarray selective epitaxy; monolithically integrated eight-stripe microarray distributed-feedback laser diodes; multi-range wavelength-selectable light-sources; multimode-interference optical combiner; multiple ranges; semiconductor optical amplifier; single wafer; uniform device characteristics; wavelength-selectable light-sources; wavelength-selectable microarray light sources;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20000565