• DocumentCode
    1355877
  • Title

    Antenna coupled far-infrared/THz detector in CMOS

  • Author

    Morf, Thomas ; Weiss, Jonas ; Kull, Lukas ; Rothuizen, Hugo ; Toifl, Thomas ; Kossel, Marcel ; Menolfi, Christian ; von Bueren, G. ; Brunschwiler, Thomas ; Schmatz, Martin

  • Author_Institution
    IBM Res. GmbH, Ruschlikon, Switzerland
  • Volume
    45
  • Issue
    25
  • fYear
    2009
  • Firstpage
    1321
  • Lastpage
    1323
  • Abstract
    An infrared detector in standard SOI technology is proposed that comprises an antenna-coupled bolometer and a MOSFET as a sensor. As proof of concept, a logarithmic planar antenna was designed and implemented in 90 nm bulk CMOS technology and connected to the proposed detector. Measurements at 10 m wavelength confirm the feasibility of this approach.
  • Keywords
    CMOS image sensors; infrared detectors; silicon-on-insulator; terahertz wave imaging; MOSFET; SOI technology; antenna coupled far-infrared/THz detector; antenna-coupled bolometer; bulk CMOS technology; infrared detector; logarithmic planar antenna; wavelength 90 nm;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el.2009.1991
  • Filename
    5353359
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1355877