High-yield processing and single-mode operation of passive antiguide region vertical-cavity lasers

Author

Wu, Y.A. ; Li, Gabriel S. ; Yuen, Wupen ; Caneau, C. ; Chang-Hasnain, Constance J.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA

Volume

3

Issue

2

fYear

1997

fDate

4/1/1997 12:00:00 AM

Firstpage

429

Lastpage

434

Abstract

We report the first continuous-wave (CW) operation single-mode, low-threshold, passive antiguide region (PAR) vertical-cavity surface-emitting laser (VCSEL) using organometallic chemical vapor deposition (OMCVD) for the regrowth of the PAR structure. With improved laser wafer design, fabrication process and regrowth design, a stable single fundamental mode at high currents has been achieved experimentally for laser aperture as large as 16 μm diameter. Single-mode power of 1.7 mW is achieved with more than 20-dB high-order mode suppression. The lasers show a more than 99% yield with high uniformity. Isolation etch and wet-thermal oxidation are used to study and eliminate the finite-leakage current in the PAR VCSEL´s. Using multimode rate equations in conjunction with beam propagation method, single-mode lasing criteria is derived for PAR VCSEL. PAR VCSEL is shown to be a very efficient structure to meet the single-mode lasing condition

Keywords

laser cavity resonators; laser modes; laser stability; optical design techniques; optical fabrication; semiconductor growth; surface emitting lasers; vapour phase epitaxial growth; waveguide lasers; 1.7 mW; 16 mum; CW operation single-mode low-threshold passive antiguide region VCSEL laser; OMCVD; beam propagation method; continuous-wave; fabrication process; finite-leakage current; high currents; high uniformity; high-order mode suppression; high-yield processing; laser aperture; laser wafer design; multimode rate equations; organometallic chemical vapor deposition; passive antiguide region vertical-cavity lasers; regrowth design; single-mode lasing criteria; single-mode operation; single-mode power; stable single fundamental mode; wet-thermal oxidation; Apertures; Chemical lasers; Chemical vapor deposition; Laser modes; Laser stability; Optical design; Optical device fabrication; Process design; Surface emitting lasers; Vertical cavity surface emitting lasers;

fLanguage

English

Journal_Title

Selected Topics in Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

1077-260X

Type

jour

DOI

10.1109/2944.605689

Filename

605689