DocumentCode
1358324
Title
An application of polarized domains in ferroelectric thin films using scanning probe microscope
Author
Shin, Hyunjung ; Lee, Kyung-Mee ; Moon, Won-Kyu ; Jeon, Jong Up ; Lim, Geunbae ; Pak, Y.Eugene ; Park, Jeong Hwan ; Yoon, Ki Hyun
Author_Institution
Lab. of Micro Syst., Samsung Adv. Inst. of Technol., Suwon, South Korea
Volume
47
Issue
4
fYear
2000
fDate
7/1/2000 12:00:00 AM
Firstpage
801
Lastpage
807
Abstract
The feasibility of utilizing PZT films as future data storage media was investigated using a modified AFM. Applying voltages between a conductive AFM tip and the PZT films causes the switching of ferroelectric domains. The domains are observed using an EFM imaging technique. The experimental results and calculations revealed that the electrostatic force generated between the polarized area and the tip is a main contributor for the imaging of the polarized domains. The written features on ferroelectric films were less than 100 nm in diameter, implying the possibility of realizing data storage devices with ultra-high area density. The disappearance of the polarized images without any applied voltage was observed, which is a drawback in this application of PZT thin films.
Keywords
atomic force microscopy; electric domains; ferroelectric storage; ferroelectric switching; ferroelectric thin films; lead compounds; EFM imaging; PZT; PZT films; PbZrO3TiO3; conductive AFM tip; data storage media; domain switching; electrostatic force; ferroelectric thin films; modified AFM; polarized domains; Atomic force microscopy; Conductive films; Electrostatics; Ferroelectric films; Ferroelectric materials; Magnetic force microscopy; Polarization; Probes; Transistors; Writing;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/58.852061
Filename
852061
Link To Document