DocumentCode
1358350
Title
High-Performance 4H–SiC-Based Metal–Insulator–Semiconductor Ultraviolet Photodetectors With
and
https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1358350
 ultraviolet (UV) photodetectors with thermally grown SiO<sub>2</sub> and evaporated Al<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> (A/S) films are fabricated and demonstrated as normally-off and normally-on mode devices, respectively. Ultralow dark currents of 3.25 × 10<sup>-10</sup> and 9.75 × 10<sup>-9</sup> A/cm<sup>2</sup> and high UV-to-visible rejection ratios of >; 2 × 10<sup>3</sup> have been achieved at 10 V. The peak responsivities of these devices were separately 30 mA/W at 260 nm and 50 mA/W at 270 nm at 10 V. These results demonstrate that S/4H-SiC and A/S/4H-SiC MIS photodetectors are promising candidates to be applied in optoelectronic integrated circuits.</div></div>
</li>
<li class='list-group-item border-0 py-3 px-0'>
<div class='row g-0 align-items-center mb-2'><div class='col-12 col-md-3 fullRecLabelEnglish fw-bold mb-2 mb-md-0'><span class='text-muted small'>Keywords</span></div><div class='col-12 col-md-9 leftDirection leftAlign'>MIS devices; aluminium compounds; photodetectors; silicon compounds; wide band gap semiconductors; Al<sub>2</sub>O<sub>3</sub>-SiO<sub>2</sub>; SiC; high-performance metal-insulator-semiconductor ultraviolet photodetectors; optoelectronic integrated circuits; size 260 nm; size 270 nm; ultralow dark currents; voltage 10 V; Aluminum oxide; Dark current; Detectors; Photoconductivity; Photodetectors; Silicon carbide; Substrates; Metal–insulator–semiconductor (MIS) devices; photodetectors; ultraviolet (UV) detectors;</div></div>
</li>
<li class='list-group-item border-0 py-3 px-0'>
<div class='row g-0 align-items-center mb-2'><div class='col-12 col-md-3 fullRecLabelEnglish fw-bold mb-2 mb-md-0'><span class='text-muted small'>fLanguage</span></div><div class='col-12 col-md-9 leftDirection leftAlign'>English</div></div>
</li>
<li class='list-group-item border-0 py-3 px-0'>
<div class='row g-0 align-items-center mb-2'><div class='col-12 col-md-3 fullRecLabelEnglish fw-bold mb-2 mb-md-0'><span class='text-muted small'>Journal_Title</span></div><div class='col-12 col-md-9 leftDirection leftAlign'>Electron Device Letters, IEEE</div></div>
</li>
<li class='list-group-item border-0 py-3 px-0'>
<div class='row g-0 align-items-center mb-2'><div class='col-12 col-md-3 fullRecLabelEnglish fw-bold mb-2 mb-md-0'><span class='text-muted small'>Publisher</span></div><div class='col-12 col-md-9 leftDirection leftAlign'>ieee</div></div>
</li>
<li class='list-group-item border-0 py-3 px-0'>
<div class='row g-0 align-items-center mb-2'><div class='col-12 col-md-3 fullRecLabelEnglish fw-bold mb-2 mb-md-0'><span class='text-muted small'>ISSN</span></div><div class='col-12 col-md-9 leftDirection leftAlign'>0741-3106</div></div>
</li>
<li class='list-group-item border-0 py-3 px-0'>
<div class='row g-0 align-items-center mb-2'><div class='col-12 col-md-3 fullRecLabelEnglish fw-bold mb-2 mb-md-0'><span class='text-muted small'>Type</span></div><div class='col-12 col-md-9 leftDirection leftAlign'><h2 class='mb-0 fw-semibold'>jour</h2></div></div>
</li>
<li class='list-group-item border-0 py-3 px-0'>
<div class='row g-0 align-items-center mb-2'><div class='col-12 col-md-3 fullRecLabelEnglish fw-bold mb-2 mb-md-0'><span class='text-muted small'>DOI</span></div><div class='col-12 col-md-9 leftDirection leftAlign'>10.1109/LED.2011.2168597</div></div>
</li>
<li class='list-group-item border-0 py-3 px-0'>
<div class='row g-0 align-items-center mb-2'><div class='col-12 col-md-3 fullRecLabelEnglish fw-bold mb-2 mb-md-0'><span class='text-muted small'>Filename</span></div><div class='col-12 col-md-9 leftDirection leftAlign'>6058579</div></div>
</li>
<div class='list-group-item border-0 py-3 px-0'>
<div class='row g-0 align-items-center'><div class='col-12 col-md-3 fw-bold mb-2 mb-md-0'><span class='text-muted small'>Link To Document</span></div><div class='col-12 col-md-9 leftDirection leftAlign'><a class='text-break' href='https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1358350' target='_blank' rel=)
https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1358350