Title :
PZT thin films for microsensors and actuators: Where do we stand?
Author_Institution :
Lab. de Ceramique, Ecole Polytech. Fed. de Lausanne, Switzerland
fDate :
7/1/2000 12:00:00 AM
Abstract :
This paper reviews deposition, integration, and device fabrication of PbZr/sub x/Ti/sub 1-x/O/sub 3/ (PZT) films for applications in micro-electromechanical systems. An ultrasonic micromotor is described as an example. A summary of the published data on piezoelectric properties is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented. The state of the art allows some preliminary conclusions.
Keywords :
lead compounds; microactuators; micromotors; microsensors; piezoelectric actuators; reliability; ultrasonic motors; PZT; PZT thin films; PbZr/sub x/Ti/sub 1-x/O/sub 3/; PbZrO3TiO3; applications; depolarization; deposition; device fabrication; figures of merit; integration; micro-electromechanical systems; microactuators; microsensors; operation; piezoelectric properties; reliability; reviews; ultrasonic micromotor; Actuators; Fabrication; Ferroelectric materials; Micromechanical devices; Microsensors; Piezoelectric films; Sensor arrays; Silicon; Sputtering; Transistors;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
