Title :
A low noise, high resolution silicon temperature sensor
Author :
Szajda, Kenneth S. ; Sodini, Charles G. ; Bowman, H.Frederick
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA
fDate :
9/1/1996 12:00:00 AM
Abstract :
High resolution temperature measurement is essential for determination of blood perfusion in biomaterials. A compact, low noise, high resolution temperature sensor designed for use in an invasive tissue property measurement probe is presented. The circuit is based on traditional proportional-to-absolute-temperature (PTAT) principles. A feedback technique is used to improve linearity and reduce noise. Data from test chips shows temperature resolution of 3 m°C. The chips were fabricated using a 1.75 μm double poly, single metal modified CMOS process designed for this project
Keywords :
CMOS analogue integrated circuits; biomedical electronics; biomedical equipment; biothermics; blood flow measurement; circuit feedback; electric sensing devices; elemental semiconductors; integrated circuit noise; patient monitoring; probes; silicon; temperature measurement; temperature sensors; 1.75 micron; CMOS process; Si; Si temperature sensor; biomaterials; blood perfusion; double poly single metal process; feedback technique; high resolution sensor; invasive tissue property measurement probe; low noise temperature sensor; proportional-to-absolute-temperature principle; Blood; Circuit noise; Feedback; Linearity; Noise measurement; Probes; Semiconductor device measurement; Silicon; Temperature measurement; Temperature sensors;
Journal_Title :
Solid-State Circuits, IEEE Journal of
