A low noise, high resolution silicon temperature sensor

Author

Szajda, Kenneth S. ; Sodini, Charles G. ; Bowman, H.Frederick

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA

Volume

31

Issue

9

fYear

1996

fDate

9/1/1996 12:00:00 AM

Firstpage

1308

Lastpage

1313

Abstract

High resolution temperature measurement is essential for determination of blood perfusion in biomaterials. A compact, low noise, high resolution temperature sensor designed for use in an invasive tissue property measurement probe is presented. The circuit is based on traditional proportional-to-absolute-temperature (PTAT) principles. A feedback technique is used to improve linearity and reduce noise. Data from test chips shows temperature resolution of 3 m°C. The chips were fabricated using a 1.75 μm double poly, single metal modified CMOS process designed for this project

Keywords

CMOS analogue integrated circuits; biomedical electronics; biomedical equipment; biothermics; blood flow measurement; circuit feedback; electric sensing devices; elemental semiconductors; integrated circuit noise; patient monitoring; probes; silicon; temperature measurement; temperature sensors; 1.75 micron; CMOS process; Si; Si temperature sensor; biomaterials; blood perfusion; double poly single metal process; feedback technique; high resolution sensor; invasive tissue property measurement probe; low noise temperature sensor; proportional-to-absolute-temperature principle; Blood; Circuit noise; Feedback; Linearity; Noise measurement; Probes; Semiconductor device measurement; Silicon; Temperature measurement; Temperature sensors;

fLanguage

English

Journal_Title

Solid-State Circuits, IEEE Journal of

Publisher

ieee

ISSN

0018-9200

Type

jour

DOI

10.1109/4.535415

Filename

535415