Title :
Fabrication of ridge waveguides in LiNbO3 thin film crystal by proton-exchange accelerated etching
Author :
Takaoka, Tadao ; Fujimura, Makoto ; Suhara, Toshiaki
Author_Institution :
Dept. of Electr., Electron., & Inf. Eng., Osaka Univ., Suita, Japan
Abstract :
A simple fabrication method of adhered LiNbO3 ridge waveguides by accelerated etching of the proton-exchanged region is proposed and demonstrated. The waveguides were fabricated and tested at 1.55 mum wavelength. Strongly confined guided modes were obtained. The waveguides are suitable for efficient nonlinear-optic wavelength conversion devices.
Keywords :
etching; lithium compounds; ridge waveguides; thin films; LiNbO3; nonlinear-optic wavelength conversion devices; proton-exchange accelerated etching; ridge waveguides; thin film crystal;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2009.1693
