Improved MEMS AE sensors in HARM technology

Author

Sommer, Rainer ; Freitag, Michael ; Schaufuss, J. ; Sorger, A. ; Mehner, J.

Author_Institution

Tech. Univ. Chemnitz, Chemnitz, Germany

fYear

2014

fDate

11-14 Feb. 2014

Firstpage

1

Lastpage

4

Abstract

In this work a MEMS based acoustic emission (AE) sensor is fabricated in a modified high aspect ratio micromachining (HARM) technology. The improved band-pass sensor consisting of four single resonators is developed to detect AE signals in the increased frequency range of 100 kHz-130 kHz. Additionally the sensor´s sensitivity is reduced below the working frequencies to avoid overloads of the signal conditioning circuitry caused by disturbing low frequency vibrations. The sensor will be used for failure detection in hybrid components like wind turbines and to monitor conveyor belts in terms of wear and friction.

Keywords

acoustic emission; acoustic signal detection; failure analysis; micromachining; micromechanical resonators; microsensors; signal conditioning circuits; vibrations; AE signal detection; HARM technology; MEMS AE sensor fabrication; acoustic emission; band-pass sensor; failure detection; frequency 100 kHz to 130 kHz; high aspect ratio machining; hybrid components; low frequency vibration; resonator; signal conditioning circuitry; Friction; Indexes; Integrated circuits; Mechanical sensors; Monitoring; Resonant frequency; Acoustic emission sensor; MEMS; increased bandwidth; mechanical band-pass;

fLanguage

English

Publisher

ieee

Conference_Titel

Multi-Conference on Systems, Signals & Devices (SSD), 2014 11th International

Conference_Location

Barcelona

Type

conf

DOI

10.1109/SSD.2014.6808917

Filename

6808917